Line Sensors

CHRocodile CLS line sensors are the ideal tools for accurate and reliable 3D inline inspection in a wide range of manufacturing applications. They deliver precise distance and layer thickness data of a sample along a line, and their scanning speed allows a sample’s 3D structure to be determined in a very short time. Their chromatic confocal measurement technology supplies data of extremely high lateral and axial resolution, enables measurement of any kind of material, and functions without shadowing effects – even for complex geometries. Typical applications for these line sensors include measuring displays or determining the topography of semiconductor chips.

The CHRocodile CLS 2 Pro is a versatile workhorse offering the optimum combination of great speed, long line length and a high acceptance angle. The CHRocodile CLS 2 combines very high speed with measurement accuracy, while the CHRocodile CLS HS enables precision measurements, especially on dark samples and surfaces. The whole CLS family is well suited to a wide variety of measuring tasks and ensures no shadowing thanks to the co-axial set-up.

Line sensor CHRocodile CLS 2Pro

• Unique combination of high line length and up to 45° acceptance angle, e.g. 8 mm with 38°
• Scans at up to 36,000 lines /sec
• High point density of 21 million measuring points 
•  Excellent lateral resolution

Line sensor CHRocodile CLS 2

• High speed, high acceptance angle and excellent resolution
• Optical probes with the highest numerical aperture of any CLS device
• High point density of 21 million measuring points 

Line sensor CHRocodile CLS HS

• Outstanding lateral resolution
• No channel cross-talk
• Relatively high speed compared to other line sensors in the Precitec portfolio