Flying Spot Scanner 310 winner of 2023 Prism Award

24 companies across eight categories were honored at the SPIE Prism Awards gala evening on February 1 during the Photonics West trade show in San Francisco.
One of them was Precitec Optronik, winner in the Test and Measurement category for its Flying Spot Scanner (FSS) 310.

“That our Flying Spot Scanner 310 has won at this year’s Prism Awards ceremony is a special distinction for us,” says Jean-Francois Pichot, Precitec Optronics Sales Director. “We’re convinced that this innovative scanner will bring customers a competitive advantage in measurement, inline inspection and quality control. It’s rightly been referred to as ‘a silent revolution in the world of semiconductor metrology’.” 

Innovation in photonics
The SPIE Prism Awards recognize “industrial innovation in photonics”, a description that certainly fits the Flying Spot Scanner 310. In a single scan it can measure the total thickness variation (TTV), bow and warp of an entire 12-inch wafer and detect any voids – in as little as 10 seconds per wafer for standard applications.

Unique features
The FSS 310 uniquely combines OCT with wide field-of-view scanning and solves the issue of ultra-precise measuring systems normally working very slowly and being extremely expensive. This scanner’s flexible and fast-moving measurement point within a wide field of view enables non-contact ROI inspection in much reduced cycle times – with no comprises on accuracy. The FSS 310 can also significantly boost productivity in semiconductor production by enabling a throughput of over 300 wafers per hour (including handling time). The key to such speed is its in-built scanning system which allows the long paths of linear axes to be replaced by short rotary movements. This significantly reduces measuring times and does away with the need for a precision axis.

Broad range of applications
Another key benefit is that the FSS 310 allows measurements from just one side of a wafer. It penetrates all the commonly used semiconductor materials (apart from metal) and can even measure objects behind or on the rear side of a wafer. This flexibility is also evident in the broad range of applications the FSS 310 is suitable for. When combined with devices from the Precitec CHRocodile® 2 IT family, the FSS 310’s fully variable scan trajectories, which the user can program, enable thickness and distance measurements of, for example, Si, doped Si, GaAs and SiC wafers. The FSS 310 can also measure the thickness of semiconductor component coatings (e.g. partial foliation of wafers) as well as measuring the bow of individual dies on wafers prior to further processing.

SPIE Prism Awards
“The 2023 Prism Award finalists represent the most innovative technologies and developments in the optics and photonics industry,” said SPIE CEO Kent Rochford. The annual gala celebration of the Prism Awards was again staged by SPIE, the international society for optics and photonics that has been bringing engineers, scientists, students, and business professionals together to advance light-based science and technology since 1955.

Precitec Optronik winner of Prism Award 2023
Prism Award

その他の興味深いトピック

エノバセンスがInVison Award 2024を受賞

Enovasense honored as inVision Top Innovation 2024

Thickness measurement of opaque and semi-transparent coatings with laser photothermal technology.


Once again this year, a jury consisting of the…

もっと見る

Award for Precitec in the categorie "Innovation"

Receiving recognition in the "Innovation" category from the  World Economic Forum was a genuine honour for Precitec. This acknowledgment serves as a…

もっと見る

従業員 Precitec India

Precitec India設立

従業員全員が新しく設立された Precitec India Pvt Ltd.の将来を期待を込めて、新たな章の始まりを記念する重要な祝賀会に集まりました。 このイベントは一緒に素晴らしいことを達成しようという熱意であふれていました。

Precitec の経営責任者、Christof Lehner…

もっと見る

Laser World of Photonicsは、Precitecにとって素晴らしい展示会でした

ミュンヘンのLaser World of Photonicsは素晴らしい場所でした

ミュンヘンのLaser World of Photonicsでの本当に素晴らしい一週間が終わりました。 レーザおよびフォトニクス業界の世界をリードするプラットフォームとして、ユーザー、発振器メーカー、システムプロバイダーが集まるこのイベントは特に重要です。

Precitec…

もっと見る

Precitec has become part of New Champion Community

Precitec は、世界経済フォーラムに新しいチャンピオンとして招待されました。 このネットワークは、責任あるビジネス モデルが成功の基盤であると考える、45 か国の 100 社を超える革新的かつ高成長企業で構成されています。…

もっと見る

クラッディングヘッドCoaxPrinterがRingier Technology Innovation awardを受賞しました

同軸ワイヤーを使用したクラッディングヘッド「CoaxPrinter」が新たな賞を受賞

中国の見本市で発表されたCoaxPrinterが、レーザ加工部門でRingier Technology…

もっと見る

Prism Award 2023 for Flying Spot Scanner 310

Precitec 3D Metrology wins SPIE Prism Award 2023

Yesterday evening, Precitec Optronik GmbH was awarded the prestigious Prism Award 2023 in the "Test and Measurement" category for the FSS 310 sensor…

もっと見る

The Enovasense team in Paris is now part of the Precitec Group

Precitec acquires majority stake in Paris-based Enovasense

Precitec has acquired a majority stake in the French start-up Enovasense with its technology to measure the thickness of all kinds of coatings on any…

もっと見る

LASCAM systems becomes official distributor of Precitec

LASCAM systems becomes official distributor for Precitec

LASCAM systems announces the official cooperation with Precitec. Recently LASCAM became the only official distributor of Precitec's complete portfolio…

もっと見る

Precitec at Euroblech 2022

EuroBLECH in Hanover

We returned from this year's EuroBLECH in Hanover with a consistently positive summary. As the largest trade fair for the sheet metal working…

もっと見る