Flying Spot Scanner 310 winner of 2023 Prism Award

24 companies across eight categories were honored at the SPIE Prism Awards gala evening on February 1 during the Photonics West trade show in San Francisco.
One of them was Precitec Optronik, winner in the Test and Measurement category for its Flying Spot Scanner (FSS) 310.

“That our Flying Spot Scanner 310 has won at this year’s Prism Awards ceremony is a special distinction for us,” says Jean-Francois Pichot, Precitec Optronics Sales Director. “We’re convinced that this innovative scanner will bring customers a competitive advantage in measurement, inline inspection and quality control. It’s rightly been referred to as ‘a silent revolution in the world of semiconductor metrology’.” 

Innovation in photonics
The SPIE Prism Awards recognize “industrial innovation in photonics”, a description that certainly fits the Flying Spot Scanner 310. In a single scan it can measure the total thickness variation (TTV), bow and warp of an entire 12-inch wafer and detect any voids – in as little as 10 seconds per wafer for standard applications.

Unique features
The FSS 310 uniquely combines OCT with wide field-of-view scanning and solves the issue of ultra-precise measuring systems normally working very slowly and being extremely expensive. This scanner’s flexible and fast-moving measurement point within a wide field of view enables non-contact ROI inspection in much reduced cycle times – with no comprises on accuracy. The FSS 310 can also significantly boost productivity in semiconductor production by enabling a throughput of over 300 wafers per hour (including handling time). The key to such speed is its in-built scanning system which allows the long paths of linear axes to be replaced by short rotary movements. This significantly reduces measuring times and does away with the need for a precision axis.

Broad range of applications
Another key benefit is that the FSS 310 allows measurements from just one side of a wafer. It penetrates all the commonly used semiconductor materials (apart from metal) and can even measure objects behind or on the rear side of a wafer. This flexibility is also evident in the broad range of applications the FSS 310 is suitable for. When combined with devices from the Precitec CHRocodile® 2 IT family, the FSS 310’s fully variable scan trajectories, which the user can program, enable thickness and distance measurements of, for example, Si, doped Si, GaAs and SiC wafers. The FSS 310 can also measure the thickness of semiconductor component coatings (e.g. partial foliation of wafers) as well as measuring the bow of individual dies on wafers prior to further processing.

SPIE Prism Awards
“The 2023 Prism Award finalists represent the most innovative technologies and developments in the optics and photonics industry,” said SPIE CEO Kent Rochford. The annual gala celebration of the Prism Awards was again staged by SPIE, the international society for optics and photonics that has been bringing engineers, scientists, students, and business professionals together to advance light-based science and technology since 1955.

Precitec Optronik winner of Prism Award 2023
Prism Award

이 주제도 흥미로울 수 있습니다.

인비슨 어워드 2024, 에너바센스 수상

Enovasense honored as inVision Top Innovation 2024

Thickness measurement of opaque and semi-transparent coatings with laser photothermal technology.


Once again this year, a jury consisting of the…

Learn more

Precitec이 "혁신" 부문에서 수상

세계경제포럼의 "혁신(Innovation)" 부문에서 인정을 받은 것은 Precitec에게 정말 영광이었습니다. 이 인정은 우리의 모든 성과를 입증하는 역할을 합니다. New Champions Retreat 2023은 AI 혁신, 지속 가능성 및 2024년의 전략적…

Learn more

 직원 프레시텍 인도

Precitec India 설립

기대와 함께 새로 설립된 Precitec India Pvt. Ltd.의 모든 미래 직원은 새로운 장의 시작을 기념하는 중대한 축하 행사에 모였습니다. 이번 행사는 열정과 함께 위대한 일을 이루고자 하는 열망이 특징이었습니다.

Precitec 경영 책임자인 크리스토프…

Learn more

Laser World of Photonics는 Precitec에게 멋진 전시회였습니다.

뮌헨의 Laser World of Photonics는 훌륭한했습니다.

뮌헨의 Laser World of Photonics에서 정말 좋은 한 주를 보냈습니다. 레이저 및 포토닉스 산업을 위한 세계 최고의 플랫폼으로서 사용자, 빔 소스 제조업체 및 시스템 제공업체의 혼합으로 이 전시회는 특히 중요했습니다.

 

Precitec은 이 활기찬…

Learn more

Precitec은 New Champion 커뮤니티의 일부가 되었습니다.

우리는 Precitec이 새로운 챔피언으로 세계 경제 포럼에 초대되었음을 발표하게 된 것을 기쁘게 생각합니다. New Champion Network는 책임감있는 비즈니스 모델을 성공의 기반으로 여기는 45개국에서 100개 이상의 혁신적이고 고성장하는 기업으로…

Learn more

클래딩 헤드 CoaxPrinter가 Ringier 기술 혁신상을 수상했습니다.

CoaxPrinter의 새로운 상, 동축 와이어 클래딩용 레이저 광학

중국의 여러 무역 박람회에서 선보인 CoaxPrinter는 레이저 가공 부문에서 Ringier Technology Innovation 상을 수상했습니다. CoaxPrinter는 선조 구조에서 대용량 3D 부품에 이르기까지 적층 가공 분야에서 광범위한 응용 분야를…

Learn more

Prism Award 2023 for Flying Spot Scanner 310

Precitec 3D Metrology wins SPIE Prism Award 2023

Yesterday evening, Precitec Optronik GmbH was awarded the prestigious Prism Award 2023 in the "Test and Measurement" category for the FSS 310 sensor…

Learn more

The Enovasense team in Paris is now part of the Precitec Group

Precitec acquires majority stake in Paris-based Enovasense

Precitec has acquired a majority stake in the French start-up Enovasense with its technology to measure the thickness of all kinds of coatings on any…

Learn more

LASCAM systems becomes official distributor of Precitec

LASCAM 시스템이 Precitec의 공식 대리점이 됨

LASCAM 시스템은 Precitec과 공식 협력을 발표했습니다. 최근 LASCAM은 체코, 헝가리, 슬로바키아에서 Precitec의 전체 레이저 공정 헤드 및 품질 모니터링 시스템 포트폴리오의 유일한 공식 유통업체가 되었습니다. 여기에는 보증 및 사후 보증 서비스와…

Learn more

Precitec at Euroblech 2022

EuroBLECH in Hanover

We returned from this year's EuroBLECH in Hanover with a consistently positive summary. As the largest trade fair for the sheet metal working…

Learn more