用於晶圓形貌和弓形控制的全場非接觸光學繪圖
計量學邁向半導體創新的前線
這篇Photonics文章強調了先進的計量技術如何走向半導體製造的最前線，在先進的節點上實現更嚴格的製程控制。文章強調了高精度線上測量解決方案（例如Precitec 3D Metrology的解決方案）對於確保現代晶圓廠的良率、速度和可靠性的重要性。全文（英文）可點擊此連結閱讀。
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